CMP cleaning machine
CMP cleaning machine
Post-CMP cleaning of MEMS is a very delicate process. There are many MEMS devices with three-dimensional structures, making it extremely challenging to clean without damaging the structures themselves. By fully utilizing the cleaning technology for MEMS devices that we have developed over many years, it is possible to return MEMS devices to the existing line after CMP processing. ● For other functions and details, please download the catalog.
- Company：D-process
- Price：Other
